6/28/2010	9:37:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	9:37:31 AM	Recipe started at 9:37 AM
6/28/2010	9:37:31 AM	H2 valve closed
6/28/2010	9:37:31 AM	BCl3 valve closed
6/28/2010	9:37:31 AM	PH3 valve closed
6/28/2010	9:37:31 AM	SiCl4 pre valve closed
6/28/2010	9:37:31 AM	SiCl4 post valve closed
6/28/2010	9:37:31 AM	Main Vac valve closed
6/28/2010	9:37:31 AM	Bypass valve closed
6/28/2010	9:37:31 AM	Bubbler valve closed
6/28/2010	9:37:31 AM	Helium valve opened
6/28/2010	9:37:31 AM	Helium MFC set to  500.000000
6/28/2010	9:37:31 AM	H2 MFC set to  0.000000
6/28/2010	9:37:31 AM	BCl3 MFC set to  0.000000
6/28/2010	9:37:31 AM	PHl3 MFC set to  0.000000
6/28/2010	9:37:31 AM	SiCl4 MFC set to  0.000000
6/28/2010	9:37:31 AM	Bypass solenoid MFC set to  0.000000
6/28/2010	9:37:31 AM	Tube furnace set to 0
6/28/2010	9:38:51 AM	Helium valve closed
6/28/2010	9:38:51 AM	H2 valve closed
6/28/2010	9:38:51 AM	BCl3 valve closed
6/28/2010	9:38:51 AM	PH3 valve closed
6/28/2010	9:38:51 AM	SiCl4 pre valve closed
6/28/2010	9:38:51 AM	SiCl4 post valve closed
6/28/2010	9:38:51 AM	Main Vac valve closed
6/28/2010	9:38:51 AM	Bypass valve closed
6/28/2010	9:38:51 AM	Bubbler valve closed
6/28/2010	9:38:51 AM	Helium MFC set to  0.000000
6/28/2010	9:38:51 AM	H2 MFC set to  0.000000
6/28/2010	9:38:51 AM	BCl3 MFC set to  0.000000
6/28/2010	9:38:51 AM	PHl3 MFC set to  0.000000
6/28/2010	9:38:51 AM	SiCl4 MFC set to  0.000000
6/28/2010	9:38:51 AM	Bypass solenoid MFC set to  0.000000
6/28/2010	9:38:51 AM	Tube furnace set to 0
6/28/2010	9:38:51 AM	Run finished at 9:38 AM
6/28/2010	9:38:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	1:36:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	1:36:15 PM	Recipe started at 1:36 PM
6/28/2010	1:36:15 PM	Helium valve closed
6/28/2010	1:36:15 PM	H2 valve closed
6/28/2010	1:36:15 PM	BCl3 valve closed
6/28/2010	1:36:15 PM	PH3 valve closed
6/28/2010	1:36:15 PM	SiCl4 pre valve closed
6/28/2010	1:36:15 PM	SiCl4 post valve closed
6/28/2010	1:36:15 PM	Main Vac valve closed
6/28/2010	1:36:15 PM	Bubbler valve closed
6/28/2010	1:36:15 PM	Bypass valve opened
6/28/2010	1:36:15 PM	Helium MFC set to  0.000000
6/28/2010	1:36:15 PM	H2 MFC set to  0.000000
6/28/2010	1:36:15 PM	BCl3 MFC set to  0.000000
6/28/2010	1:36:15 PM	PHl3 MFC set to  0.000000
6/28/2010	1:36:15 PM	SiCl4 MFC set to  0.000000
6/28/2010	1:36:15 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	1:36:15 PM	Tube furnace set to 0
6/28/2010	1:37:12 PM	Helium valve closed
6/28/2010	1:37:12 PM	H2 valve closed
6/28/2010	1:37:12 PM	BCl3 valve closed
6/28/2010	1:37:12 PM	PH3 valve closed
6/28/2010	1:37:12 PM	SiCl4 pre valve closed
6/28/2010	1:37:12 PM	SiCl4 post valve closed
6/28/2010	1:37:12 PM	Bubbler valve closed
6/28/2010	1:37:12 PM	Main Vac valve opened
6/28/2010	1:37:12 PM	Bypass valve opened
6/28/2010	1:37:12 PM	Helium MFC set to  0.000000
6/28/2010	1:37:12 PM	H2 MFC set to  0.000000
6/28/2010	1:37:12 PM	BCl3 MFC set to  0.000000
6/28/2010	1:37:12 PM	PHl3 MFC set to  0.000000
6/28/2010	1:37:12 PM	SiCl4 MFC set to  0.000000
6/28/2010	1:37:12 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	1:37:12 PM	Tube furnace set to 0
6/28/2010	1:37:12 PM	Run finished at 1:37 PM
6/28/2010	1:37:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	1:37:40 PM	Helium MFC set to  100.000000
6/28/2010	1:37:44 PM	Helium valve opened
6/28/2010	1:56:53 PM	Helium valve closed
6/28/2010	1:57:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	1:57:31 PM	Recipe started at 1:57 PM
6/28/2010	1:57:31 PM	H2 valve closed
6/28/2010	1:57:31 PM	BCl3 valve closed
6/28/2010	1:57:31 PM	PH3 valve closed
6/28/2010	1:57:31 PM	SiCl4 pre valve closed
6/28/2010	1:57:31 PM	SiCl4 post valve closed
6/28/2010	1:57:31 PM	Main Vac valve closed
6/28/2010	1:57:31 PM	Bypass valve closed
6/28/2010	1:57:31 PM	Bubbler valve closed
6/28/2010	1:57:31 PM	Helium valve opened
6/28/2010	1:57:31 PM	Helium MFC set to  500.000000
6/28/2010	1:57:31 PM	H2 MFC set to  0.000000
6/28/2010	1:57:31 PM	BCl3 MFC set to  0.000000
6/28/2010	1:57:31 PM	PHl3 MFC set to  0.000000
6/28/2010	1:57:31 PM	SiCl4 MFC set to  0.000000
6/28/2010	1:57:31 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	1:57:31 PM	Tube furnace set to 0
6/28/2010	1:58:52 PM	Helium valve closed
6/28/2010	1:58:52 PM	H2 valve closed
6/28/2010	1:58:52 PM	BCl3 valve closed
6/28/2010	1:58:52 PM	PH3 valve closed
6/28/2010	1:58:52 PM	SiCl4 pre valve closed
6/28/2010	1:58:52 PM	SiCl4 post valve closed
6/28/2010	1:58:52 PM	Main Vac valve closed
6/28/2010	1:58:52 PM	Bypass valve closed
6/28/2010	1:58:52 PM	Bubbler valve closed
6/28/2010	1:58:52 PM	Helium MFC set to  0.000000
6/28/2010	1:58:52 PM	H2 MFC set to  0.000000
6/28/2010	1:58:52 PM	BCl3 MFC set to  0.000000
6/28/2010	1:58:52 PM	PHl3 MFC set to  0.000000
6/28/2010	1:58:52 PM	SiCl4 MFC set to  0.000000
6/28/2010	1:58:52 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	1:58:52 PM	Tube furnace set to 0
6/28/2010	1:58:52 PM	Run finished at 1:58 PM
6/28/2010	1:58:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	3:19:42 PM	Helium valve closed
6/28/2010	3:19:42 PM	H2 valve closed
6/28/2010	3:19:42 PM	BCl3 valve closed
6/28/2010	3:19:42 PM	PH3 valve closed
6/28/2010	3:19:42 PM	SiCl4 pre valve closed
6/28/2010	3:19:42 PM	SiCl4 post valve closed
6/28/2010	3:19:42 PM	Main Vac valve closed
6/28/2010	3:19:42 PM	Bubbler valve closed
6/28/2010	3:19:42 PM	Bypass valve opened
6/28/2010	3:19:42 PM	Helium MFC set to  0.000000
6/28/2010	3:19:42 PM	H2 MFC set to  0.000000
6/28/2010	3:19:42 PM	BCl3 MFC set to  0.000000
6/28/2010	3:19:42 PM	PHl3 MFC set to  0.000000
6/28/2010	3:19:42 PM	SiCl4 MFC set to  0.000000
6/28/2010	3:19:42 PM	Bypass solenoid MFC set to  760.000000
6/28/2010	3:19:42 PM	Tube furnace set to 0
6/28/2010	3:19:42 PM	Baratron reads 1062.879148 Torr.  Emergency exit.
6/28/2010	3:19:50 PM	Program exited cleanly
6/28/2010	3:19:58 PM	Program started normally
6/28/2010	3:19:58 PM	Helium valve closed
6/28/2010	3:19:58 PM	H2 valve closed
6/28/2010	3:19:58 PM	BCl3 valve closed
6/28/2010	3:19:58 PM	PH3 valve closed
6/28/2010	3:19:58 PM	SiCl4 pre valve closed
6/28/2010	3:19:58 PM	SiCl4 post valve closed
6/28/2010	3:19:58 PM	Main Vac valve closed
6/28/2010	3:19:58 PM	Bypass valve closed
6/28/2010	3:19:58 PM	Bubbler valve closed
6/28/2010	3:19:58 PM	Helium MFC set to  0.000000
6/28/2010	3:19:58 PM	H2 MFC set to  0.000000
6/28/2010	3:19:58 PM	BCl3 MFC set to  0.000000
6/28/2010	3:19:58 PM	PHl3 MFC set to  0.000000
6/28/2010	3:19:58 PM	SiCl4 MFC set to  0.000000
6/28/2010	3:19:58 PM	Bypass solenoid MFC set to  760.000000
6/28/2010	3:19:58 PM	Tube furnace set to 0
6/28/2010	3:20:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	3:20:56 PM	Recipe started at 3:20 PM
6/28/2010	3:20:56 PM	Helium valve closed
6/28/2010	3:20:56 PM	H2 valve closed
6/28/2010	3:20:56 PM	BCl3 valve closed
6/28/2010	3:20:56 PM	PH3 valve closed
6/28/2010	3:20:56 PM	SiCl4 pre valve closed
6/28/2010	3:20:56 PM	SiCl4 post valve closed
6/28/2010	3:20:56 PM	Main Vac valve closed
6/28/2010	3:20:56 PM	Bubbler valve closed
6/28/2010	3:20:56 PM	Bypass valve opened
6/28/2010	3:20:56 PM	Helium MFC set to  0.000000
6/28/2010	3:20:56 PM	H2 MFC set to  0.000000
6/28/2010	3:20:56 PM	BCl3 MFC set to  0.000000
6/28/2010	3:20:56 PM	PHl3 MFC set to  0.000000
6/28/2010	3:20:56 PM	SiCl4 MFC set to  0.000000
6/28/2010	3:20:56 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	3:20:57 PM	Tube furnace set to 0
6/28/2010	3:21:55 PM	Helium valve closed
6/28/2010	3:21:55 PM	H2 valve closed
6/28/2010	3:21:55 PM	BCl3 valve closed
6/28/2010	3:21:55 PM	PH3 valve closed
6/28/2010	3:21:55 PM	SiCl4 pre valve closed
6/28/2010	3:21:55 PM	SiCl4 post valve closed
6/28/2010	3:21:55 PM	Bubbler valve closed
6/28/2010	3:21:55 PM	Main Vac valve opened
6/28/2010	3:21:55 PM	Bypass valve opened
6/28/2010	3:21:55 PM	Helium MFC set to  0.000000
6/28/2010	3:21:55 PM	H2 MFC set to  0.000000
6/28/2010	3:21:55 PM	BCl3 MFC set to  0.000000
6/28/2010	3:21:55 PM	PHl3 MFC set to  0.000000
6/28/2010	3:21:55 PM	SiCl4 MFC set to  0.000000
6/28/2010	3:21:55 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	3:21:56 PM	Tube furnace set to 0
6/28/2010	3:21:56 PM	Run finished at 3:21 PM
6/28/2010	3:21:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	3:22:21 PM	Helium MFC set to  100.000000
6/28/2010	3:22:22 PM	Helium valve opened
6/28/2010	4:00:50 PM	Helium valve closed
6/28/2010	4:02:21 PM	Helium valve opened
6/28/2010	4:02:41 PM	Helium valve closed
6/28/2010	4:06:54 PM	Helium valve opened
6/28/2010	4:07:14 PM	Helium valve closed
6/28/2010	4:08:16 PM	Helium valve opened
6/28/2010	4:12:09 PM	Helium valve closed
6/28/2010	4:17:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	4:17:09 PM	Recipe started at 4:17 PM
6/28/2010	4:17:09 PM	H2 valve closed
6/28/2010	4:17:09 PM	BCl3 valve closed
6/28/2010	4:17:09 PM	PH3 valve closed
6/28/2010	4:17:09 PM	SiCl4 pre valve closed
6/28/2010	4:17:09 PM	SiCl4 post valve closed
6/28/2010	4:17:09 PM	Main Vac valve closed
6/28/2010	4:17:09 PM	Bypass valve closed
6/28/2010	4:17:09 PM	Bubbler valve closed
6/28/2010	4:17:09 PM	Helium valve opened
6/28/2010	4:17:09 PM	Helium MFC set to  500.000000
6/28/2010	4:17:09 PM	H2 MFC set to  0.000000
6/28/2010	4:17:09 PM	BCl3 MFC set to  0.000000
6/28/2010	4:17:09 PM	PHl3 MFC set to  0.000000
6/28/2010	4:17:09 PM	SiCl4 MFC set to  0.000000
6/28/2010	4:17:09 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	4:17:09 PM	Tube furnace set to 0
6/28/2010	4:19:10 PM	Run aborted at 4:19 PM
6/28/2010	4:19:10 PM	Helium valve closed
6/28/2010	4:19:10 PM	H2 valve closed
6/28/2010	4:19:10 PM	BCl3 valve closed
6/28/2010	4:19:10 PM	PH3 valve closed
6/28/2010	4:19:10 PM	SiCl4 pre valve closed
6/28/2010	4:19:10 PM	SiCl4 post valve closed
6/28/2010	4:19:10 PM	Bypass valve closed
6/28/2010	4:19:10 PM	Main Vac valve closed
6/28/2010	4:19:10 PM	Bubbler valve closed
6/28/2010	4:19:10 PM	Helium MFC set to  0.000000
6/28/2010	4:19:10 PM	H2 MFC set to  0.000000
6/28/2010	4:19:10 PM	BCl3 MFC set to  0.000000
6/28/2010	4:19:10 PM	PHl3 MFC set to  0.000000
6/28/2010	4:19:10 PM	SiCl4 MFC set to  0.000000
6/28/2010	4:19:10 PM	Tube furnace set to 0
6/28/2010	4:19:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	4:19:19 PM	Bypass valve opened
6/28/2010	4:19:34 PM	Bypass valve closed
6/28/2010	4:35:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	4:35:42 PM	Recipe started at 4:35 PM
6/28/2010	4:35:42 PM	Helium valve closed
6/28/2010	4:35:42 PM	H2 valve closed
6/28/2010	4:35:42 PM	BCl3 valve closed
6/28/2010	4:35:42 PM	PH3 valve closed
6/28/2010	4:35:42 PM	SiCl4 pre valve closed
6/28/2010	4:35:42 PM	SiCl4 post valve closed
6/28/2010	4:35:42 PM	Main Vac valve closed
6/28/2010	4:35:42 PM	Bubbler valve closed
6/28/2010	4:35:42 PM	Bypass valve opened
6/28/2010	4:35:42 PM	Helium MFC set to  0.000000
6/28/2010	4:35:42 PM	H2 MFC set to  0.000000
6/28/2010	4:35:42 PM	BCl3 MFC set to  0.000000
6/28/2010	4:35:42 PM	PHl3 MFC set to  0.000000
6/28/2010	4:35:42 PM	SiCl4 MFC set to  0.000000
6/28/2010	4:35:42 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	4:35:42 PM	Tube furnace set to 0
6/28/2010	4:36:35 PM	Helium valve closed
6/28/2010	4:36:35 PM	H2 valve closed
6/28/2010	4:36:35 PM	BCl3 valve closed
6/28/2010	4:36:35 PM	PH3 valve closed
6/28/2010	4:36:35 PM	SiCl4 pre valve closed
6/28/2010	4:36:35 PM	SiCl4 post valve closed
6/28/2010	4:36:35 PM	Bubbler valve closed
6/28/2010	4:36:35 PM	Main Vac valve opened
6/28/2010	4:36:35 PM	Bypass valve opened
6/28/2010	4:36:35 PM	Helium MFC set to  0.000000
6/28/2010	4:36:35 PM	H2 MFC set to  0.000000
6/28/2010	4:36:35 PM	BCl3 MFC set to  0.000000
6/28/2010	4:36:35 PM	PHl3 MFC set to  0.000000
6/28/2010	4:36:35 PM	SiCl4 MFC set to  0.000000
6/28/2010	4:36:35 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	4:36:35 PM	Tube furnace set to 0
6/28/2010	4:36:35 PM	Run finished at 4:36 PM
6/28/2010	4:36:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	4:37:32 PM	Helium MFC set to  100.000000
6/28/2010	4:37:33 PM	Helium valve opened
6/28/2010	4:40:08 PM	Helium valve closed
6/28/2010	4:40:49 PM	Helium valve opened
6/28/2010	5:02:31 PM	Helium valve closed
6/28/2010	5:03:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	5:03:39 PM	Recipe started at 5:03 PM
6/28/2010	5:03:39 PM	H2 valve closed
6/28/2010	5:03:39 PM	BCl3 valve closed
6/28/2010	5:03:39 PM	PH3 valve closed
6/28/2010	5:03:39 PM	SiCl4 pre valve closed
6/28/2010	5:03:39 PM	SiCl4 post valve closed
6/28/2010	5:03:39 PM	Main Vac valve closed
6/28/2010	5:03:39 PM	Bypass valve closed
6/28/2010	5:03:39 PM	Bubbler valve closed
6/28/2010	5:03:39 PM	Helium valve opened
6/28/2010	5:03:39 PM	Helium MFC set to  500.000000
6/28/2010	5:03:39 PM	H2 MFC set to  0.000000
6/28/2010	5:03:39 PM	BCl3 MFC set to  0.000000
6/28/2010	5:03:39 PM	PHl3 MFC set to  0.000000
6/28/2010	5:03:39 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:03:39 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:03:39 PM	Tube furnace set to 0
6/28/2010	5:04:59 PM	Helium valve closed
6/28/2010	5:04:59 PM	H2 valve closed
6/28/2010	5:04:59 PM	BCl3 valve closed
6/28/2010	5:04:59 PM	PH3 valve closed
6/28/2010	5:04:59 PM	SiCl4 pre valve closed
6/28/2010	5:04:59 PM	SiCl4 post valve closed
6/28/2010	5:04:59 PM	Main Vac valve closed
6/28/2010	5:04:59 PM	Bypass valve closed
6/28/2010	5:04:59 PM	Bubbler valve closed
6/28/2010	5:04:59 PM	Helium MFC set to  0.000000
6/28/2010	5:04:59 PM	H2 MFC set to  0.000000
6/28/2010	5:04:59 PM	BCl3 MFC set to  0.000000
6/28/2010	5:04:59 PM	PHl3 MFC set to  0.000000
6/28/2010	5:04:59 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:04:59 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:04:59 PM	Tube furnace set to 0
6/28/2010	5:05:00 PM	Run finished at 5:05 PM
6/28/2010	5:05:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	5:16:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	5:16:47 PM	Recipe started at 5:16 PM
6/28/2010	5:16:47 PM	Helium valve closed
6/28/2010	5:16:47 PM	H2 valve closed
6/28/2010	5:16:47 PM	BCl3 valve closed
6/28/2010	5:16:47 PM	PH3 valve closed
6/28/2010	5:16:47 PM	SiCl4 pre valve closed
6/28/2010	5:16:47 PM	SiCl4 post valve closed
6/28/2010	5:16:47 PM	Main Vac valve closed
6/28/2010	5:16:47 PM	Bubbler valve closed
6/28/2010	5:16:47 PM	Bypass valve opened
6/28/2010	5:16:47 PM	Helium MFC set to  0.000000
6/28/2010	5:16:47 PM	H2 MFC set to  0.000000
6/28/2010	5:16:47 PM	BCl3 MFC set to  0.000000
6/28/2010	5:16:47 PM	PHl3 MFC set to  0.000000
6/28/2010	5:16:47 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:16:47 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:16:47 PM	Tube furnace set to 0
6/28/2010	5:17:35 PM	Helium valve closed
6/28/2010	5:17:35 PM	H2 valve closed
6/28/2010	5:17:35 PM	BCl3 valve closed
6/28/2010	5:17:35 PM	PH3 valve closed
6/28/2010	5:17:35 PM	SiCl4 pre valve closed
6/28/2010	5:17:35 PM	SiCl4 post valve closed
6/28/2010	5:17:35 PM	Bubbler valve closed
6/28/2010	5:17:35 PM	Main Vac valve opened
6/28/2010	5:17:35 PM	Bypass valve opened
6/28/2010	5:17:35 PM	Helium MFC set to  0.000000
6/28/2010	5:17:35 PM	H2 MFC set to  0.000000
6/28/2010	5:17:35 PM	BCl3 MFC set to  0.000000
6/28/2010	5:17:35 PM	PHl3 MFC set to  0.000000
6/28/2010	5:17:35 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:17:35 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:17:35 PM	Tube furnace set to 0
6/28/2010	5:17:35 PM	Run finished at 5:17 PM
6/28/2010	5:17:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	5:17:57 PM	Helium MFC set to  100.000000
6/28/2010	5:17:58 PM	Helium valve opened
6/28/2010	5:21:13 PM	Helium valve closed
6/28/2010	5:21:54 PM	Helium valve opened
6/28/2010	5:24:42 PM	Helium MFC set to  0.000000
6/28/2010	5:24:43 PM	Helium valve closed
6/28/2010	5:26:26 PM	Recipe started at 5:26 PM
6/28/2010	5:26:26 PM	Helium valve closed
6/28/2010	5:26:26 PM	H2 valve closed
6/28/2010	5:26:26 PM	BCl3 valve closed
6/28/2010	5:26:26 PM	PH3 valve closed
6/28/2010	5:26:26 PM	SiCl4 pre valve closed
6/28/2010	5:26:26 PM	SiCl4 post valve closed
6/28/2010	5:26:26 PM	Main Vac valve closed
6/28/2010	5:26:26 PM	Bubbler valve closed
6/28/2010	5:26:26 PM	Bypass valve opened
6/28/2010	5:26:26 PM	Helium MFC set to  0.000000
6/28/2010	5:26:26 PM	H2 MFC set to  0.000000
6/28/2010	5:26:26 PM	BCl3 MFC set to  0.000000
6/28/2010	5:26:26 PM	PHl3 MFC set to  0.000000
6/28/2010	5:26:26 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:26:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:26:26 PM	Tube furnace set to 0
6/28/2010	5:26:26 PM	Helium valve closed
6/28/2010	5:26:26 PM	H2 valve closed
6/28/2010	5:26:26 PM	BCl3 valve closed
6/28/2010	5:26:26 PM	PH3 valve closed
6/28/2010	5:26:26 PM	SiCl4 pre valve closed
6/28/2010	5:26:26 PM	SiCl4 post valve closed
6/28/2010	5:26:26 PM	Bubbler valve closed
6/28/2010	5:26:26 PM	Main Vac valve opened
6/28/2010	5:26:26 PM	Bypass valve opened
6/28/2010	5:26:26 PM	Helium MFC set to  0.000000
6/28/2010	5:26:26 PM	H2 MFC set to  0.000000
6/28/2010	5:26:26 PM	BCl3 MFC set to  0.000000
6/28/2010	5:26:26 PM	PHl3 MFC set to  0.000000
6/28/2010	5:26:26 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:26:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:26:26 PM	Tube furnace set to 0
6/28/2010	5:27:26 PM	H2 valve closed
6/28/2010	5:27:26 PM	BCl3 valve closed
6/28/2010	5:27:26 PM	PH3 valve closed
6/28/2010	5:27:26 PM	SiCl4 pre valve closed
6/28/2010	5:27:26 PM	SiCl4 post valve closed
6/28/2010	5:27:26 PM	Bubbler valve closed
6/28/2010	5:27:26 PM	Helium valve opened
6/28/2010	5:27:26 PM	Main Vac valve opened
6/28/2010	5:27:26 PM	Bypass valve opened
6/28/2010	5:27:26 PM	Helium MFC set to  100.000000
6/28/2010	5:27:26 PM	H2 MFC set to  0.000000
6/28/2010	5:27:26 PM	BCl3 MFC set to  0.000000
6/28/2010	5:27:26 PM	PHl3 MFC set to  0.000000
6/28/2010	5:27:26 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:27:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:27:27 PM	Tube furnace set to 0
6/28/2010	5:32:27 PM	Helium valve closed
6/28/2010	5:32:27 PM	H2 valve closed
6/28/2010	5:32:27 PM	BCl3 valve closed
6/28/2010	5:32:27 PM	PH3 valve closed
6/28/2010	5:32:27 PM	SiCl4 pre valve closed
6/28/2010	5:32:27 PM	SiCl4 post valve closed
6/28/2010	5:32:27 PM	Bubbler valve closed
6/28/2010	5:32:27 PM	Main Vac valve opened
6/28/2010	5:32:27 PM	Bypass valve opened
6/28/2010	5:32:27 PM	Helium MFC set to  0.000000
6/28/2010	5:32:27 PM	H2 MFC set to  0.000000
6/28/2010	5:32:27 PM	BCl3 MFC set to  0.000000
6/28/2010	5:32:27 PM	PHl3 MFC set to  0.000000
6/28/2010	5:32:27 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:32:27 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:32:27 PM	Tube furnace set to 0
6/28/2010	5:37:27 PM	H2 valve closed
6/28/2010	5:37:27 PM	BCl3 valve closed
6/28/2010	5:37:27 PM	PH3 valve closed
6/28/2010	5:37:27 PM	SiCl4 pre valve closed
6/28/2010	5:37:27 PM	SiCl4 post valve closed
6/28/2010	5:37:27 PM	Bubbler valve closed
6/28/2010	5:37:27 PM	Helium valve opened
6/28/2010	5:37:27 PM	Main Vac valve opened
6/28/2010	5:37:27 PM	Bypass valve opened
6/28/2010	5:37:27 PM	Helium MFC set to  100.000000
6/28/2010	5:37:27 PM	H2 MFC set to  0.000000
6/28/2010	5:37:27 PM	BCl3 MFC set to  0.000000
6/28/2010	5:37:27 PM	PHl3 MFC set to  0.000000
6/28/2010	5:37:27 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:37:27 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:37:27 PM	Tube furnace set to 0
6/28/2010	5:42:27 PM	Helium valve closed
6/28/2010	5:42:27 PM	H2 valve closed
6/28/2010	5:42:27 PM	BCl3 valve closed
6/28/2010	5:42:27 PM	PH3 valve closed
6/28/2010	5:42:27 PM	SiCl4 pre valve closed
6/28/2010	5:42:27 PM	SiCl4 post valve closed
6/28/2010	5:42:27 PM	Bubbler valve closed
6/28/2010	5:42:27 PM	Main Vac valve opened
6/28/2010	5:42:27 PM	Bypass valve opened
6/28/2010	5:42:27 PM	Helium MFC set to  0.000000
6/28/2010	5:42:27 PM	H2 MFC set to  0.000000
6/28/2010	5:42:27 PM	BCl3 MFC set to  0.000000
6/28/2010	5:42:27 PM	PHl3 MFC set to  0.000000
6/28/2010	5:42:27 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:42:27 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:42:27 PM	Tube furnace set to 0
6/28/2010	5:47:27 PM	H2 valve closed
6/28/2010	5:47:27 PM	BCl3 valve closed
6/28/2010	5:47:27 PM	PH3 valve closed
6/28/2010	5:47:27 PM	SiCl4 pre valve closed
6/28/2010	5:47:27 PM	SiCl4 post valve closed
6/28/2010	5:47:27 PM	Bubbler valve closed
6/28/2010	5:47:27 PM	Helium valve opened
6/28/2010	5:47:27 PM	Main Vac valve opened
6/28/2010	5:47:27 PM	Bypass valve opened
6/28/2010	5:47:27 PM	Helium MFC set to  100.000000
6/28/2010	5:47:27 PM	H2 MFC set to  0.000000
6/28/2010	5:47:27 PM	BCl3 MFC set to  0.000000
6/28/2010	5:47:27 PM	PHl3 MFC set to  0.000000
6/28/2010	5:47:27 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:47:27 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:47:27 PM	Tube furnace set to 0
6/28/2010	5:52:27 PM	Helium valve closed
6/28/2010	5:52:27 PM	H2 valve closed
6/28/2010	5:52:27 PM	BCl3 valve closed
6/28/2010	5:52:27 PM	PH3 valve closed
6/28/2010	5:52:27 PM	SiCl4 pre valve closed
6/28/2010	5:52:27 PM	SiCl4 post valve closed
6/28/2010	5:52:27 PM	Bubbler valve closed
6/28/2010	5:52:27 PM	Main Vac valve opened
6/28/2010	5:52:27 PM	Bypass valve opened
6/28/2010	5:52:27 PM	Helium MFC set to  0.000000
6/28/2010	5:52:27 PM	H2 MFC set to  0.000000
6/28/2010	5:52:27 PM	BCl3 MFC set to  0.000000
6/28/2010	5:52:27 PM	PHl3 MFC set to  0.000000
6/28/2010	5:52:27 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:52:27 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:52:27 PM	Tube furnace set to 0
6/28/2010	5:52:28 PM	Run finished at 5:52 PM
6/28/2010	5:53:58 PM	Recipe started at 5:53 PM
6/28/2010	5:53:58 PM	Helium valve closed
6/28/2010	5:53:58 PM	BCl3 valve closed
6/28/2010	5:53:58 PM	PH3 valve closed
6/28/2010	5:53:58 PM	SiCl4 pre valve closed
6/28/2010	5:53:58 PM	SiCl4 post valve closed
6/28/2010	5:53:58 PM	Main Vac valve closed
6/28/2010	5:53:58 PM	Bypass valve closed
6/28/2010	5:53:58 PM	Bubbler valve closed
6/28/2010	5:53:58 PM	H2 valve opened
6/28/2010	5:53:58 PM	Helium MFC set to  0.000000
6/28/2010	5:53:58 PM	H2 MFC set to  500.000000
6/28/2010	5:53:58 PM	BCl3 MFC set to  0.000000
6/28/2010	5:53:58 PM	PHl3 MFC set to  0.000000
6/28/2010	5:53:58 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:53:58 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:53:58 PM	Tube furnace set to 0
6/28/2010	5:55:20 PM	Helium valve closed
6/28/2010	5:55:20 PM	BCl3 valve closed
6/28/2010	5:55:20 PM	PH3 valve closed
6/28/2010	5:55:20 PM	SiCl4 pre valve closed
6/28/2010	5:55:20 PM	SiCl4 post valve closed
6/28/2010	5:55:20 PM	Main Vac valve closed
6/28/2010	5:55:20 PM	Bypass valve closed
6/28/2010	5:55:20 PM	H2 valve opened
6/28/2010	5:55:20 PM	Bubbler valve opened
6/28/2010	5:55:20 PM	Helium MFC set to  0.000000
6/28/2010	5:55:20 PM	H2 MFC set to  500.000000
6/28/2010	5:55:20 PM	BCl3 MFC set to  0.000000
6/28/2010	5:55:20 PM	PHl3 MFC set to  0.000000
6/28/2010	5:55:20 PM	SiCl4 MFC set to  0.000000
6/28/2010	5:55:20 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	5:55:20 PM	Tube furnace set to 1000
6/28/2010	6:15:20 PM	Helium valve closed
6/28/2010	6:15:20 PM	PH3 valve closed
6/28/2010	6:15:20 PM	Main Vac valve closed
6/28/2010	6:15:20 PM	Bypass valve closed
6/28/2010	6:15:20 PM	H2 valve opened
6/28/2010	6:15:20 PM	BCl3 valve opened
6/28/2010	6:15:20 PM	SiCl4 pre valve opened
6/28/2010	6:15:20 PM	SiCl4 post valve opened
6/28/2010	6:15:20 PM	Bubbler valve opened
6/28/2010	6:15:20 PM	Helium MFC set to  0.000000
6/28/2010	6:15:20 PM	H2 MFC set to  500.000000
6/28/2010	6:15:20 PM	BCl3 MFC set to  35.000000
6/28/2010	6:15:20 PM	PHl3 MFC set to  0.000000
6/28/2010	6:15:20 PM	SiCl4 MFC set to  50.000000
6/28/2010	6:15:20 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	6:15:20 PM	Tube furnace set to 1000
6/28/2010	6:30:20 PM	H2 valve closed
6/28/2010	6:30:20 PM	BCl3 valve closed
6/28/2010	6:30:20 PM	PH3 valve closed
6/28/2010	6:30:20 PM	SiCl4 pre valve closed
6/28/2010	6:30:20 PM	SiCl4 post valve closed
6/28/2010	6:30:20 PM	Main Vac valve closed
6/28/2010	6:30:20 PM	Bypass valve closed
6/28/2010	6:30:20 PM	Helium valve opened
6/28/2010	6:30:20 PM	Bubbler valve opened
6/28/2010	6:30:20 PM	Helium MFC set to  500.000000
6/28/2010	6:30:20 PM	H2 MFC set to  0.000000
6/28/2010	6:30:20 PM	BCl3 MFC set to  0.000000
6/28/2010	6:30:20 PM	PHl3 MFC set to  0.000000
6/28/2010	6:30:20 PM	SiCl4 MFC set to  0.000000
6/28/2010	6:30:20 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	6:30:21 PM	Tube furnace set to 750
6/28/2010	6:50:21 PM	H2 valve closed
6/28/2010	6:50:21 PM	BCl3 valve closed
6/28/2010	6:50:21 PM	PH3 valve closed
6/28/2010	6:50:21 PM	SiCl4 pre valve closed
6/28/2010	6:50:21 PM	SiCl4 post valve closed
6/28/2010	6:50:21 PM	Main Vac valve closed
6/28/2010	6:50:21 PM	Bypass valve closed
6/28/2010	6:50:21 PM	Helium valve opened
6/28/2010	6:50:21 PM	Bubbler valve opened
6/28/2010	6:50:21 PM	Helium MFC set to  500.000000
6/28/2010	6:50:21 PM	H2 MFC set to  0.000000
6/28/2010	6:50:21 PM	BCl3 MFC set to  0.000000
6/28/2010	6:50:21 PM	PHl3 MFC set to  0.000000
6/28/2010	6:50:21 PM	SiCl4 MFC set to  0.000000
6/28/2010	6:50:21 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	6:50:21 PM	Tube furnace set to 0
6/28/2010	7:10:21 PM	Helium valve closed
6/28/2010	7:10:21 PM	H2 valve closed
6/28/2010	7:10:21 PM	BCl3 valve closed
6/28/2010	7:10:21 PM	PH3 valve closed
6/28/2010	7:10:21 PM	SiCl4 pre valve closed
6/28/2010	7:10:21 PM	SiCl4 post valve closed
6/28/2010	7:10:21 PM	Main Vac valve closed
6/28/2010	7:10:21 PM	Bypass valve closed
6/28/2010	7:10:21 PM	Bubbler valve closed
6/28/2010	7:10:21 PM	Helium MFC set to  0.000000
6/28/2010	7:10:21 PM	H2 MFC set to  0.000000
6/28/2010	7:10:21 PM	BCl3 MFC set to  0.000000
6/28/2010	7:10:21 PM	PHl3 MFC set to  0.000000
6/28/2010	7:10:21 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:10:21 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:10:21 PM	Tube furnace set to 0
6/28/2010	7:10:21 PM	Run finished at 7:10 PM
6/28/2010	7:28:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	7:28:32 PM	Recipe started at 7:28 PM
6/28/2010	7:28:32 PM	H2 valve closed
6/28/2010	7:28:32 PM	BCl3 valve closed
6/28/2010	7:28:32 PM	PH3 valve closed
6/28/2010	7:28:32 PM	SiCl4 pre valve closed
6/28/2010	7:28:32 PM	SiCl4 post valve closed
6/28/2010	7:28:32 PM	Main Vac valve closed
6/28/2010	7:28:32 PM	Bypass valve closed
6/28/2010	7:28:32 PM	Bubbler valve closed
6/28/2010	7:28:32 PM	Helium valve opened
6/28/2010	7:28:32 PM	Helium MFC set to  500.000000
6/28/2010	7:28:32 PM	H2 MFC set to  0.000000
6/28/2010	7:28:32 PM	BCl3 MFC set to  0.000000
6/28/2010	7:28:32 PM	PHl3 MFC set to  0.000000
6/28/2010	7:28:32 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:28:32 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:28:33 PM	Tube furnace set to 0
6/28/2010	7:28:35 PM	Helium valve closed
6/28/2010	7:28:35 PM	H2 valve closed
6/28/2010	7:28:35 PM	BCl3 valve closed
6/28/2010	7:28:35 PM	PH3 valve closed
6/28/2010	7:28:35 PM	SiCl4 pre valve closed
6/28/2010	7:28:35 PM	SiCl4 post valve closed
6/28/2010	7:28:35 PM	Main Vac valve closed
6/28/2010	7:28:35 PM	Bypass valve closed
6/28/2010	7:28:35 PM	Bubbler valve closed
6/28/2010	7:28:35 PM	Helium MFC set to  0.000000
6/28/2010	7:28:35 PM	H2 MFC set to  0.000000
6/28/2010	7:28:35 PM	BCl3 MFC set to  0.000000
6/28/2010	7:28:35 PM	PHl3 MFC set to  0.000000
6/28/2010	7:28:35 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:28:35 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:28:35 PM	Tube furnace set to 0
6/28/2010	7:28:35 PM	Run finished at 7:28 PM
6/28/2010	7:28:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	7:41:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	7:41:13 PM	Recipe started at 7:41 PM
6/28/2010	7:41:13 PM	Helium valve closed
6/28/2010	7:41:13 PM	H2 valve closed
6/28/2010	7:41:13 PM	BCl3 valve closed
6/28/2010	7:41:13 PM	PH3 valve closed
6/28/2010	7:41:13 PM	SiCl4 pre valve closed
6/28/2010	7:41:13 PM	SiCl4 post valve closed
6/28/2010	7:41:13 PM	Main Vac valve closed
6/28/2010	7:41:13 PM	Bubbler valve closed
6/28/2010	7:41:13 PM	Bypass valve opened
6/28/2010	7:41:13 PM	Helium MFC set to  0.000000
6/28/2010	7:41:13 PM	H2 MFC set to  0.000000
6/28/2010	7:41:13 PM	BCl3 MFC set to  0.000000
6/28/2010	7:41:13 PM	PHl3 MFC set to  0.000000
6/28/2010	7:41:13 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:41:13 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:41:13 PM	Tube furnace set to 0
6/28/2010	7:42:01 PM	Helium valve closed
6/28/2010	7:42:01 PM	H2 valve closed
6/28/2010	7:42:01 PM	BCl3 valve closed
6/28/2010	7:42:01 PM	PH3 valve closed
6/28/2010	7:42:01 PM	SiCl4 pre valve closed
6/28/2010	7:42:01 PM	SiCl4 post valve closed
6/28/2010	7:42:01 PM	Bubbler valve closed
6/28/2010	7:42:01 PM	Main Vac valve opened
6/28/2010	7:42:01 PM	Bypass valve opened
6/28/2010	7:42:01 PM	Helium MFC set to  0.000000
6/28/2010	7:42:01 PM	H2 MFC set to  0.000000
6/28/2010	7:42:01 PM	BCl3 MFC set to  0.000000
6/28/2010	7:42:01 PM	PHl3 MFC set to  0.000000
6/28/2010	7:42:01 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:42:01 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:42:02 PM	Tube furnace set to 0
6/28/2010	7:42:02 PM	Run finished at 7:42 PM
6/28/2010	7:42:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	7:42:40 PM	Recipe started at 7:42 PM
6/28/2010	7:42:40 PM	Helium valve closed
6/28/2010	7:42:40 PM	H2 valve closed
6/28/2010	7:42:40 PM	BCl3 valve closed
6/28/2010	7:42:40 PM	PH3 valve closed
6/28/2010	7:42:40 PM	SiCl4 pre valve closed
6/28/2010	7:42:40 PM	SiCl4 post valve closed
6/28/2010	7:42:40 PM	Main Vac valve closed
6/28/2010	7:42:40 PM	Bubbler valve closed
6/28/2010	7:42:40 PM	Bypass valve opened
6/28/2010	7:42:40 PM	Helium MFC set to  0.000000
6/28/2010	7:42:40 PM	H2 MFC set to  0.000000
6/28/2010	7:42:40 PM	BCl3 MFC set to  0.000000
6/28/2010	7:42:40 PM	PHl3 MFC set to  0.000000
6/28/2010	7:42:40 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:42:40 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:42:40 PM	Tube furnace set to 0
6/28/2010	7:42:40 PM	Helium valve closed
6/28/2010	7:42:40 PM	H2 valve closed
6/28/2010	7:42:40 PM	BCl3 valve closed
6/28/2010	7:42:40 PM	PH3 valve closed
6/28/2010	7:42:40 PM	SiCl4 pre valve closed
6/28/2010	7:42:40 PM	SiCl4 post valve closed
6/28/2010	7:42:40 PM	Bubbler valve closed
6/28/2010	7:42:40 PM	Main Vac valve opened
6/28/2010	7:42:40 PM	Bypass valve opened
6/28/2010	7:42:40 PM	Helium MFC set to  0.000000
6/28/2010	7:42:40 PM	H2 MFC set to  0.000000
6/28/2010	7:42:40 PM	BCl3 MFC set to  0.000000
6/28/2010	7:42:40 PM	PHl3 MFC set to  0.000000
6/28/2010	7:42:40 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:42:40 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:42:40 PM	Tube furnace set to 0
6/28/2010	7:43:40 PM	H2 valve closed
6/28/2010	7:43:40 PM	BCl3 valve closed
6/28/2010	7:43:40 PM	PH3 valve closed
6/28/2010	7:43:40 PM	SiCl4 pre valve closed
6/28/2010	7:43:40 PM	SiCl4 post valve closed
6/28/2010	7:43:40 PM	Bubbler valve closed
6/28/2010	7:43:40 PM	Helium valve opened
6/28/2010	7:43:40 PM	Main Vac valve opened
6/28/2010	7:43:40 PM	Bypass valve opened
6/28/2010	7:43:40 PM	Helium MFC set to  100.000000
6/28/2010	7:43:40 PM	H2 MFC set to  0.000000
6/28/2010	7:43:40 PM	BCl3 MFC set to  0.000000
6/28/2010	7:43:40 PM	PHl3 MFC set to  0.000000
6/28/2010	7:43:40 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:43:40 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:43:40 PM	Tube furnace set to 0
6/28/2010	7:48:40 PM	Helium valve closed
6/28/2010	7:48:40 PM	H2 valve closed
6/28/2010	7:48:40 PM	BCl3 valve closed
6/28/2010	7:48:40 PM	PH3 valve closed
6/28/2010	7:48:41 PM	SiCl4 pre valve closed
6/28/2010	7:48:41 PM	SiCl4 post valve closed
6/28/2010	7:48:41 PM	Bubbler valve closed
6/28/2010	7:48:41 PM	Main Vac valve opened
6/28/2010	7:48:41 PM	Bypass valve opened
6/28/2010	7:48:41 PM	Helium MFC set to  0.000000
6/28/2010	7:48:41 PM	H2 MFC set to  0.000000
6/28/2010	7:48:41 PM	BCl3 MFC set to  0.000000
6/28/2010	7:48:41 PM	PHl3 MFC set to  0.000000
6/28/2010	7:48:41 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:48:41 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:48:41 PM	Tube furnace set to 0
6/28/2010	7:52:12 PM	H2 valve closed
6/28/2010	7:52:12 PM	BCl3 valve closed
6/28/2010	7:52:12 PM	PH3 valve closed
6/28/2010	7:52:12 PM	SiCl4 pre valve closed
6/28/2010	7:52:12 PM	SiCl4 post valve closed
6/28/2010	7:52:12 PM	Bubbler valve closed
6/28/2010	7:52:12 PM	Helium valve opened
6/28/2010	7:52:12 PM	Main Vac valve opened
6/28/2010	7:52:12 PM	Bypass valve opened
6/28/2010	7:52:12 PM	Helium MFC set to  100.000000
6/28/2010	7:52:12 PM	H2 MFC set to  0.000000
6/28/2010	7:52:12 PM	BCl3 MFC set to  0.000000
6/28/2010	7:52:12 PM	PHl3 MFC set to  0.000000
6/28/2010	7:52:12 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:52:12 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	7:52:12 PM	Tube furnace set to 0
6/28/2010	7:52:27 PM	Run aborted at 7:52 PM
6/28/2010	7:52:27 PM	Helium valve closed
6/28/2010	7:52:27 PM	H2 valve closed
6/28/2010	7:52:27 PM	BCl3 valve closed
6/28/2010	7:52:27 PM	PH3 valve closed
6/28/2010	7:52:27 PM	SiCl4 pre valve closed
6/28/2010	7:52:27 PM	SiCl4 post valve closed
6/28/2010	7:52:27 PM	Bypass valve closed
6/28/2010	7:52:27 PM	Main Vac valve closed
6/28/2010	7:52:27 PM	Bubbler valve closed
6/28/2010	7:52:27 PM	Helium MFC set to  0.000000
6/28/2010	7:52:27 PM	H2 MFC set to  0.000000
6/28/2010	7:52:27 PM	BCl3 MFC set to  0.000000
6/28/2010	7:52:27 PM	PHl3 MFC set to  0.000000
6/28/2010	7:52:27 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:52:27 PM	Tube furnace set to 0
6/28/2010	7:52:33 PM	Helium valve closed
6/28/2010	7:52:35 PM	Bypass valve closed
6/28/2010	7:52:35 PM	Bypass valve opened
6/28/2010	7:52:36 PM	Main Vac valve closed
6/28/2010	7:52:36 PM	Main Vac valve opened
6/28/2010	7:52:38 PM	Helium valve opened
6/28/2010	7:52:38 PM	Helium valve closed
6/28/2010	7:52:42 PM	Helium MFC set to  101.000000
6/28/2010	7:52:45 PM	Helium MFC set to  100.000000
6/28/2010	7:52:46 PM	Helium valve opened
6/28/2010	7:53:46 PM	Program exited cleanly
6/28/2010	7:53:50 PM	Program started normally
6/28/2010	7:53:50 PM	Helium valve closed
6/28/2010	7:53:50 PM	H2 valve closed
6/28/2010	7:53:50 PM	BCl3 valve closed
6/28/2010	7:53:50 PM	PH3 valve closed
6/28/2010	7:53:50 PM	SiCl4 pre valve closed
6/28/2010	7:53:50 PM	SiCl4 post valve closed
6/28/2010	7:53:50 PM	Main Vac valve closed
6/28/2010	7:53:50 PM	Bypass valve closed
6/28/2010	7:53:50 PM	Bubbler valve closed
6/28/2010	7:53:50 PM	Helium MFC set to  0.000000
6/28/2010	7:53:50 PM	H2 MFC set to  0.000000
6/28/2010	7:53:50 PM	BCl3 MFC set to  0.000000
6/28/2010	7:53:50 PM	PHl3 MFC set to  0.000000
6/28/2010	7:53:50 PM	SiCl4 MFC set to  0.000000
6/28/2010	7:53:50 PM	Bypass solenoid MFC set to  760.000000
6/28/2010	7:53:50 PM	Tube furnace set to 0
6/28/2010	7:53:55 PM	Bypass valve opened
6/28/2010	7:53:56 PM	Main Vac valve opened
6/28/2010	7:53:59 PM	Helium MFC set to  100.000000
6/28/2010	7:54:01 PM	Helium valve opened
6/28/2010	7:54:05 PM	Program exited cleanly
6/28/2010	8:17:30 PM	Program started normally
6/28/2010	8:17:30 PM	Helium valve closed
6/28/2010	8:17:30 PM	H2 valve closed
6/28/2010	8:17:30 PM	BCl3 valve closed
6/28/2010	8:17:30 PM	PH3 valve closed
6/28/2010	8:17:30 PM	SiCl4 pre valve closed
6/28/2010	8:17:30 PM	SiCl4 post valve closed
6/28/2010	8:17:30 PM	Main Vac valve closed
6/28/2010	8:17:30 PM	Bypass valve closed
6/28/2010	8:17:30 PM	Bubbler valve closed
6/28/2010	8:17:30 PM	Helium MFC set to  0.000000
6/28/2010	8:17:30 PM	H2 MFC set to  0.000000
6/28/2010	8:17:30 PM	BCl3 MFC set to  0.000000
6/28/2010	8:17:30 PM	PHl3 MFC set to  0.000000
6/28/2010	8:17:30 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:17:30 PM	Bypass solenoid MFC set to  760.000000
6/28/2010	8:17:30 PM	Tube furnace set to 0
6/28/2010	8:17:32 PM	Bypass valve opened
6/28/2010	8:17:33 PM	Main Vac valve opened
6/28/2010	8:17:36 PM	Recipe started at 8:17 PM
6/28/2010	8:17:36 PM	Helium valve closed
6/28/2010	8:17:36 PM	H2 valve closed
6/28/2010	8:17:36 PM	BCl3 valve closed
6/28/2010	8:17:36 PM	PH3 valve closed
6/28/2010	8:17:36 PM	SiCl4 pre valve closed
6/28/2010	8:17:36 PM	SiCl4 post valve closed
6/28/2010	8:17:36 PM	Bubbler valve closed
6/28/2010	8:17:36 PM	Main Vac valve opened
6/28/2010	8:17:36 PM	Bypass valve opened
6/28/2010	8:17:36 PM	Helium MFC set to  0.000000
6/28/2010	8:17:36 PM	H2 MFC set to  0.000000
6/28/2010	8:17:36 PM	BCl3 MFC set to  0.000000
6/28/2010	8:17:36 PM	PHl3 MFC set to  0.000000
6/28/2010	8:17:36 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:17:36 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	8:17:36 PM	Tube furnace set to 0
6/28/2010	8:17:36 PM	Run finished at 8:17 PM
6/28/2010	8:18:07 PM	Program exited cleanly
6/28/2010	8:18:09 PM	Program started normally
6/28/2010	8:18:09 PM	Helium valve closed
6/28/2010	8:18:09 PM	H2 valve closed
6/28/2010	8:18:09 PM	BCl3 valve closed
6/28/2010	8:18:09 PM	PH3 valve closed
6/28/2010	8:18:09 PM	SiCl4 pre valve closed
6/28/2010	8:18:09 PM	SiCl4 post valve closed
6/28/2010	8:18:09 PM	Main Vac valve closed
6/28/2010	8:18:09 PM	Bypass valve closed
6/28/2010	8:18:09 PM	Bubbler valve closed
6/28/2010	8:18:09 PM	Helium MFC set to  0.000000
6/28/2010	8:18:09 PM	H2 MFC set to  0.000000
6/28/2010	8:18:09 PM	BCl3 MFC set to  0.000000
6/28/2010	8:18:09 PM	PHl3 MFC set to  0.000000
6/28/2010	8:18:09 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:18:09 PM	Bypass solenoid MFC set to  760.000000
6/28/2010	8:18:09 PM	Tube furnace set to 0
6/28/2010	8:18:17 PM	Bypass valve opened
6/28/2010	8:18:18 PM	Main Vac valve opened
6/28/2010	8:19:31 PM	Recipe started at 8:19 PM
6/28/2010	8:19:31 PM	Helium valve closed
6/28/2010	8:19:31 PM	H2 valve closed
6/28/2010	8:19:31 PM	BCl3 valve closed
6/28/2010	8:19:31 PM	PH3 valve closed
6/28/2010	8:19:31 PM	SiCl4 pre valve closed
6/28/2010	8:19:31 PM	SiCl4 post valve closed
6/28/2010	8:19:31 PM	Bypass valve closed
6/28/2010	8:19:31 PM	Bubbler valve closed
6/28/2010	8:19:31 PM	Main Vac valve opened
6/28/2010	8:19:31 PM	Helium MFC set to  0.000000
6/28/2010	8:19:31 PM	H2 MFC set to  0.000000
6/28/2010	8:19:31 PM	BCl3 MFC set to  0.000000
6/28/2010	8:19:31 PM	PHl3 MFC set to  0.000000
6/28/2010	8:19:31 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:19:31 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	8:19:31 PM	Tube furnace set to 0
6/28/2010	8:19:31 PM	Run finished at 8:19 PM
6/28/2010	8:19:37 PM	Bypass valve opened
6/28/2010	8:19:42 PM	Bypass valve closed
6/28/2010	8:19:42 PM	Main Vac valve closed
6/28/2010	8:19:46 PM	Recipe started at 8:19 PM
6/28/2010	8:19:46 PM	Helium valve closed
6/28/2010	8:19:46 PM	H2 valve closed
6/28/2010	8:19:46 PM	BCl3 valve closed
6/28/2010	8:19:46 PM	PH3 valve closed
6/28/2010	8:19:46 PM	SiCl4 pre valve closed
6/28/2010	8:19:46 PM	SiCl4 post valve closed
6/28/2010	8:19:46 PM	Bypass valve closed
6/28/2010	8:19:46 PM	Bubbler valve closed
6/28/2010	8:19:46 PM	Main Vac valve opened
6/28/2010	8:19:46 PM	Helium MFC set to  0.000000
6/28/2010	8:19:46 PM	H2 MFC set to  0.000000
6/28/2010	8:19:46 PM	BCl3 MFC set to  0.000000
6/28/2010	8:19:46 PM	PHl3 MFC set to  0.000000
6/28/2010	8:19:46 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:19:46 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	8:19:47 PM	Tube furnace set to 0
6/28/2010	8:19:47 PM	Run finished at 8:19 PM
6/28/2010	8:20:08 PM	Recipe started at 8:20 PM
6/28/2010	8:20:08 PM	H2 valve closed
6/28/2010	8:20:08 PM	BCl3 valve closed
6/28/2010	8:20:08 PM	PH3 valve closed
6/28/2010	8:20:08 PM	SiCl4 pre valve closed
6/28/2010	8:20:08 PM	SiCl4 post valve closed
6/28/2010	8:20:08 PM	Bubbler valve closed
6/28/2010	8:20:08 PM	Helium valve opened
6/28/2010	8:20:08 PM	Main Vac valve opened
6/28/2010	8:20:08 PM	Bypass valve opened
6/28/2010	8:20:08 PM	Helium MFC set to  100.000000
6/28/2010	8:20:08 PM	H2 MFC set to  0.000000
6/28/2010	8:20:08 PM	BCl3 MFC set to  0.000000
6/28/2010	8:20:08 PM	PHl3 MFC set to  0.000000
6/28/2010	8:20:08 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:20:08 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	8:20:08 PM	Tube furnace set to 0
6/28/2010	8:20:14 PM	Run aborted at 8:20 PM
6/28/2010	8:20:14 PM	Helium valve closed
6/28/2010	8:20:14 PM	H2 valve closed
6/28/2010	8:20:14 PM	BCl3 valve closed
6/28/2010	8:20:14 PM	PH3 valve closed
6/28/2010	8:20:14 PM	SiCl4 pre valve closed
6/28/2010	8:20:14 PM	SiCl4 post valve closed
6/28/2010	8:20:14 PM	Bypass valve closed
6/28/2010	8:20:14 PM	Main Vac valve closed
6/28/2010	8:20:14 PM	Bubbler valve closed
6/28/2010	8:20:14 PM	Helium MFC set to  0.000000
6/28/2010	8:20:14 PM	H2 MFC set to  0.000000
6/28/2010	8:20:14 PM	BCl3 MFC set to  0.000000
6/28/2010	8:20:14 PM	PHl3 MFC set to  0.000000
6/28/2010	8:20:14 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:20:14 PM	Tube furnace set to 0
6/28/2010	8:20:21 PM	Main Vac valve opened
6/28/2010	8:20:22 PM	Bypass valve opened
6/28/2010	8:21:01 PM	Bypass valve closed
6/28/2010	8:21:03 PM	Main Vac valve closed
6/28/2010	8:21:23 PM	Bypass valve opened
6/28/2010	8:21:23 PM	Main Vac valve opened
6/28/2010	8:21:50 PM	Recipe started at 8:21 PM
6/28/2010	8:21:51 PM	Helium valve closed
6/28/2010	8:21:51 PM	BCl3 valve closed
6/28/2010	8:21:51 PM	PH3 valve closed
6/28/2010	8:21:51 PM	SiCl4 pre valve closed
6/28/2010	8:21:51 PM	SiCl4 post valve closed
6/28/2010	8:21:51 PM	Main Vac valve closed
6/28/2010	8:21:51 PM	Bypass valve closed
6/28/2010	8:21:51 PM	Bubbler valve closed
6/28/2010	8:21:51 PM	H2 valve opened
6/28/2010	8:21:51 PM	Helium MFC set to  0.000000
6/28/2010	8:21:51 PM	H2 MFC set to  500.000000
6/28/2010	8:21:51 PM	BCl3 MFC set to  0.000000
6/28/2010	8:21:51 PM	PHl3 MFC set to  0.000000
6/28/2010	8:21:51 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:21:51 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	8:21:51 PM	Tube furnace set to 0
6/28/2010	8:23:11 PM	Helium valve closed
6/28/2010	8:23:11 PM	BCl3 valve closed
6/28/2010	8:23:11 PM	PH3 valve closed
6/28/2010	8:23:11 PM	SiCl4 pre valve closed
6/28/2010	8:23:11 PM	SiCl4 post valve closed
6/28/2010	8:23:11 PM	Main Vac valve closed
6/28/2010	8:23:11 PM	Bypass valve closed
6/28/2010	8:23:11 PM	H2 valve opened
6/28/2010	8:23:11 PM	Bubbler valve opened
6/28/2010	8:23:11 PM	Helium MFC set to  0.000000
6/28/2010	8:23:11 PM	H2 MFC set to  500.000000
6/28/2010	8:23:11 PM	BCl3 MFC set to  0.000000
6/28/2010	8:23:11 PM	PHl3 MFC set to  0.000000
6/28/2010	8:23:11 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:23:11 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	8:23:11 PM	Tube furnace set to 1000
6/28/2010	8:43:11 PM	Helium valve closed
6/28/2010	8:43:11 PM	PH3 valve closed
6/28/2010	8:43:11 PM	Main Vac valve closed
6/28/2010	8:43:11 PM	Bypass valve closed
6/28/2010	8:43:11 PM	H2 valve opened
6/28/2010	8:43:11 PM	BCl3 valve opened
6/28/2010	8:43:11 PM	SiCl4 pre valve opened
6/28/2010	8:43:11 PM	SiCl4 post valve opened
6/28/2010	8:43:11 PM	Bubbler valve opened
6/28/2010	8:43:11 PM	Helium MFC set to  0.000000
6/28/2010	8:43:11 PM	H2 MFC set to  500.000000
6/28/2010	8:43:11 PM	BCl3 MFC set to  35.000000
6/28/2010	8:43:11 PM	PHl3 MFC set to  0.000000
6/28/2010	8:43:11 PM	SiCl4 MFC set to  50.000000
6/28/2010	8:43:11 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	8:43:11 PM	Tube furnace set to 1000
6/28/2010	8:58:11 PM	H2 valve closed
6/28/2010	8:58:11 PM	BCl3 valve closed
6/28/2010	8:58:11 PM	PH3 valve closed
6/28/2010	8:58:11 PM	SiCl4 pre valve closed
6/28/2010	8:58:11 PM	SiCl4 post valve closed
6/28/2010	8:58:11 PM	Main Vac valve closed
6/28/2010	8:58:11 PM	Bypass valve closed
6/28/2010	8:58:11 PM	Helium valve opened
6/28/2010	8:58:11 PM	Bubbler valve opened
6/28/2010	8:58:11 PM	Helium MFC set to  500.000000
6/28/2010	8:58:11 PM	H2 MFC set to  0.000000
6/28/2010	8:58:11 PM	BCl3 MFC set to  0.000000
6/28/2010	8:58:11 PM	PHl3 MFC set to  0.000000
6/28/2010	8:58:11 PM	SiCl4 MFC set to  0.000000
6/28/2010	8:58:11 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	8:58:11 PM	Tube furnace set to 750
6/28/2010	9:18:11 PM	H2 valve closed
6/28/2010	9:18:11 PM	BCl3 valve closed
6/28/2010	9:18:11 PM	PH3 valve closed
6/28/2010	9:18:11 PM	SiCl4 pre valve closed
6/28/2010	9:18:11 PM	SiCl4 post valve closed
6/28/2010	9:18:11 PM	Main Vac valve closed
6/28/2010	9:18:11 PM	Bypass valve closed
6/28/2010	9:18:11 PM	Helium valve opened
6/28/2010	9:18:11 PM	Bubbler valve opened
6/28/2010	9:18:11 PM	Helium MFC set to  500.000000
6/28/2010	9:18:11 PM	H2 MFC set to  0.000000
6/28/2010	9:18:11 PM	BCl3 MFC set to  0.000000
6/28/2010	9:18:11 PM	PHl3 MFC set to  0.000000
6/28/2010	9:18:11 PM	SiCl4 MFC set to  0.000000
6/28/2010	9:18:11 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	9:18:12 PM	Tube furnace set to 0
6/28/2010	9:38:11 PM	Helium valve closed
6/28/2010	9:38:11 PM	H2 valve closed
6/28/2010	9:38:11 PM	BCl3 valve closed
6/28/2010	9:38:11 PM	PH3 valve closed
6/28/2010	9:38:11 PM	SiCl4 pre valve closed
6/28/2010	9:38:11 PM	SiCl4 post valve closed
6/28/2010	9:38:11 PM	Main Vac valve closed
6/28/2010	9:38:12 PM	Bypass valve closed
6/28/2010	9:38:12 PM	Bubbler valve closed
6/28/2010	9:38:12 PM	Helium MFC set to  0.000000
6/28/2010	9:38:12 PM	H2 MFC set to  0.000000
6/28/2010	9:38:12 PM	BCl3 MFC set to  0.000000
6/28/2010	9:38:12 PM	PHl3 MFC set to  0.000000
6/28/2010	9:38:12 PM	SiCl4 MFC set to  0.000000
6/28/2010	9:38:12 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	9:38:12 PM	Tube furnace set to 0
6/28/2010	9:38:12 PM	Run finished at 9:38 PM
6/28/2010	10:20:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	10:20:05 PM	Recipe started at 10:20 PM
6/28/2010	10:20:05 PM	H2 valve closed
6/28/2010	10:20:05 PM	BCl3 valve closed
6/28/2010	10:20:05 PM	PH3 valve closed
6/28/2010	10:20:05 PM	SiCl4 pre valve closed
6/28/2010	10:20:05 PM	SiCl4 post valve closed
6/28/2010	10:20:05 PM	Main Vac valve closed
6/28/2010	10:20:05 PM	Bypass valve closed
6/28/2010	10:20:05 PM	Bubbler valve closed
6/28/2010	10:20:05 PM	Helium valve opened
6/28/2010	10:20:05 PM	Helium MFC set to  500.000000
6/28/2010	10:20:05 PM	H2 MFC set to  0.000000
6/28/2010	10:20:05 PM	BCl3 MFC set to  0.000000
6/28/2010	10:20:05 PM	PHl3 MFC set to  0.000000
6/28/2010	10:20:05 PM	SiCl4 MFC set to  0.000000
6/28/2010	10:20:05 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	10:20:05 PM	Tube furnace set to 0
6/28/2010	10:20:07 PM	Helium valve closed
6/28/2010	10:20:07 PM	H2 valve closed
6/28/2010	10:20:07 PM	BCl3 valve closed
6/28/2010	10:20:07 PM	PH3 valve closed
6/28/2010	10:20:07 PM	SiCl4 pre valve closed
6/28/2010	10:20:07 PM	SiCl4 post valve closed
6/28/2010	10:20:07 PM	Main Vac valve closed
6/28/2010	10:20:07 PM	Bypass valve closed
6/28/2010	10:20:07 PM	Bubbler valve closed
6/28/2010	10:20:07 PM	Helium MFC set to  0.000000
6/28/2010	10:20:07 PM	H2 MFC set to  0.000000
6/28/2010	10:20:07 PM	BCl3 MFC set to  0.000000
6/28/2010	10:20:07 PM	PHl3 MFC set to  0.000000
6/28/2010	10:20:07 PM	SiCl4 MFC set to  0.000000
6/28/2010	10:20:07 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	10:20:07 PM	Tube furnace set to 0
6/28/2010	10:20:08 PM	Run finished at 10:20 PM
6/28/2010	10:20:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/28/2010	10:41:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	10:41:28 PM	Recipe started at 10:41 PM
6/28/2010	10:41:28 PM	Helium valve closed
6/28/2010	10:41:28 PM	H2 valve closed
6/28/2010	10:41:28 PM	BCl3 valve closed
6/28/2010	10:41:28 PM	PH3 valve closed
6/28/2010	10:41:28 PM	SiCl4 pre valve closed
6/28/2010	10:41:28 PM	SiCl4 post valve closed
6/28/2010	10:41:28 PM	Main Vac valve closed
6/28/2010	10:41:28 PM	Bubbler valve closed
6/28/2010	10:41:28 PM	Bypass valve opened
6/28/2010	10:41:28 PM	Helium MFC set to  0.000000
6/28/2010	10:41:28 PM	H2 MFC set to  0.000000
6/28/2010	10:41:28 PM	BCl3 MFC set to  0.000000
6/28/2010	10:41:28 PM	PHl3 MFC set to  0.000000
6/28/2010	10:41:28 PM	SiCl4 MFC set to  0.000000
6/28/2010	10:41:28 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	10:41:28 PM	Tube furnace set to 0
6/28/2010	10:42:17 PM	Helium valve closed
6/28/2010	10:42:17 PM	H2 valve closed
6/28/2010	10:42:17 PM	BCl3 valve closed
6/28/2010	10:42:17 PM	PH3 valve closed
6/28/2010	10:42:17 PM	SiCl4 pre valve closed
6/28/2010	10:42:17 PM	SiCl4 post valve closed
6/28/2010	10:42:17 PM	Bubbler valve closed
6/28/2010	10:42:17 PM	Main Vac valve opened
6/28/2010	10:42:17 PM	Bypass valve opened
6/28/2010	10:42:17 PM	Helium MFC set to  0.000000
6/28/2010	10:42:17 PM	H2 MFC set to  0.000000
6/28/2010	10:42:17 PM	BCl3 MFC set to  0.000000
6/28/2010	10:42:17 PM	PHl3 MFC set to  0.000000
6/28/2010	10:42:17 PM	SiCl4 MFC set to  0.000000
6/28/2010	10:42:17 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	10:42:18 PM	Tube furnace set to 0
6/28/2010	10:42:18 PM	Run finished at 10:42 PM
6/28/2010	10:42:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/28/2010	10:43:25 PM	Recipe started at 10:43 PM
6/28/2010	10:43:25 PM	Helium valve closed
6/28/2010	10:43:25 PM	H2 valve closed
6/28/2010	10:43:25 PM	BCl3 valve closed
6/28/2010	10:43:25 PM	PH3 valve closed
6/28/2010	10:43:25 PM	SiCl4 pre valve closed
6/28/2010	10:43:25 PM	SiCl4 post valve closed
6/28/2010	10:43:25 PM	Main Vac valve closed
6/28/2010	10:43:25 PM	Bubbler valve closed
6/28/2010	10:43:25 PM	Bypass valve opened
6/28/2010	10:43:25 PM	Helium MFC set to  0.000000
6/28/2010	10:43:25 PM	H2 MFC set to  0.000000
6/28/2010	10:43:25 PM	BCl3 MFC set to  0.000000
6/28/2010	10:43:25 PM	PHl3 MFC set to  0.000000
6/28/2010	10:43:25 PM	SiCl4 MFC set to  0.000000
6/28/2010	10:43:25 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	10:43:25 PM	Tube furnace set to 0
6/28/2010	10:43:26 PM	Helium valve closed
6/28/2010	10:43:26 PM	H2 valve closed
6/28/2010	10:43:26 PM	BCl3 valve closed
6/28/2010	10:43:26 PM	PH3 valve closed
6/28/2010	10:43:26 PM	SiCl4 pre valve closed
6/28/2010	10:43:26 PM	SiCl4 post valve closed
6/28/2010	10:43:26 PM	Bubbler valve closed
6/28/2010	10:43:26 PM	Main Vac valve opened
6/28/2010	10:43:26 PM	Bypass valve opened
6/28/2010	10:43:26 PM	Helium MFC set to  0.000000
6/28/2010	10:43:26 PM	H2 MFC set to  0.000000
6/28/2010	10:43:26 PM	BCl3 MFC set to  0.000000
6/28/2010	10:43:26 PM	PHl3 MFC set to  0.000000
6/28/2010	10:43:26 PM	SiCl4 MFC set to  0.000000
6/28/2010	10:43:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	10:43:26 PM	Tube furnace set to 0
6/28/2010	10:44:26 PM	H2 valve closed
6/28/2010	10:44:26 PM	BCl3 valve closed
6/28/2010	10:44:26 PM	PH3 valve closed
6/28/2010	10:44:26 PM	SiCl4 pre valve closed
6/28/2010	10:44:26 PM	SiCl4 post valve closed
6/28/2010	10:44:26 PM	Bubbler valve closed
6/28/2010	10:44:26 PM	Helium valve opened
6/28/2010	10:44:26 PM	Main Vac valve opened
6/28/2010	10:44:26 PM	Bypass valve opened
6/28/2010	10:44:26 PM	Helium MFC set to  100.000000
6/28/2010	10:44:26 PM	H2 MFC set to  0.000000
6/28/2010	10:44:26 PM	BCl3 MFC set to  0.000000
6/28/2010	10:44:26 PM	PHl3 MFC set to  0.000000
6/28/2010	10:44:26 PM	SiCl4 MFC set to  0.000000
6/28/2010	10:44:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	10:44:26 PM	Tube furnace set to 0
6/28/2010	10:53:26 PM	Helium valve closed
6/28/2010	10:53:26 PM	H2 valve closed
6/28/2010	10:53:26 PM	BCl3 valve closed
6/28/2010	10:53:26 PM	PH3 valve closed
6/28/2010	10:53:26 PM	SiCl4 pre valve closed
6/28/2010	10:53:26 PM	SiCl4 post valve closed
6/28/2010	10:53:26 PM	Bubbler valve closed
6/28/2010	10:53:26 PM	Main Vac valve opened
6/28/2010	10:53:26 PM	Bypass valve opened
6/28/2010	10:53:26 PM	Helium MFC set to  0.000000
6/28/2010	10:53:26 PM	H2 MFC set to  0.000000
6/28/2010	10:53:26 PM	BCl3 MFC set to  0.000000
6/28/2010	10:53:26 PM	PHl3 MFC set to  0.000000
6/28/2010	10:53:26 PM	SiCl4 MFC set to  0.000000
6/28/2010	10:53:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	10:53:26 PM	Tube furnace set to 0
6/28/2010	10:54:26 PM	H2 valve closed
6/28/2010	10:54:26 PM	BCl3 valve closed
6/28/2010	10:54:26 PM	PH3 valve closed
6/28/2010	10:54:26 PM	SiCl4 pre valve closed
6/28/2010	10:54:26 PM	SiCl4 post valve closed
6/28/2010	10:54:26 PM	Bubbler valve closed
6/28/2010	10:54:26 PM	Helium valve opened
6/28/2010	10:54:26 PM	Main Vac valve opened
6/28/2010	10:54:26 PM	Bypass valve opened
6/28/2010	10:54:26 PM	Helium MFC set to  100.000000
6/28/2010	10:54:26 PM	H2 MFC set to  0.000000
6/28/2010	10:54:26 PM	BCl3 MFC set to  0.000000
6/28/2010	10:54:26 PM	PHl3 MFC set to  0.000000
6/28/2010	10:54:26 PM	SiCl4 MFC set to  0.000000
6/28/2010	10:54:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	10:54:26 PM	Tube furnace set to 0
6/28/2010	11:03:26 PM	Helium valve closed
6/28/2010	11:03:26 PM	H2 valve closed
6/28/2010	11:03:26 PM	BCl3 valve closed
6/28/2010	11:03:26 PM	PH3 valve closed
6/28/2010	11:03:26 PM	SiCl4 pre valve closed
6/28/2010	11:03:26 PM	SiCl4 post valve closed
6/28/2010	11:03:26 PM	Bubbler valve closed
6/28/2010	11:03:26 PM	Main Vac valve opened
6/28/2010	11:03:26 PM	Bypass valve opened
6/28/2010	11:03:26 PM	Helium MFC set to  0.000000
6/28/2010	11:03:26 PM	H2 MFC set to  0.000000
6/28/2010	11:03:26 PM	BCl3 MFC set to  0.000000
6/28/2010	11:03:26 PM	PHl3 MFC set to  0.000000
6/28/2010	11:03:26 PM	SiCl4 MFC set to  0.000000
6/28/2010	11:03:26 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	11:03:26 PM	Tube furnace set to 0
6/28/2010	11:04:26 PM	H2 valve closed
6/28/2010	11:04:26 PM	BCl3 valve closed
6/28/2010	11:04:26 PM	PH3 valve closed
6/28/2010	11:04:26 PM	SiCl4 pre valve closed
6/28/2010	11:04:26 PM	SiCl4 post valve closed
6/28/2010	11:04:26 PM	Bubbler valve closed
6/28/2010	11:04:26 PM	Helium valve opened
6/28/2010	11:04:26 PM	Main Vac valve opened
6/28/2010	11:04:26 PM	Bypass valve opened
6/28/2010	11:04:26 PM	Helium MFC set to  100.000000
6/28/2010	11:04:26 PM	H2 MFC set to  0.000000
6/28/2010	11:04:26 PM	BCl3 MFC set to  0.000000
6/28/2010	11:04:26 PM	PHl3 MFC set to  0.000000
6/28/2010	11:04:26 PM	SiCl4 MFC set to  0.000000
6/28/2010	11:04:27 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	11:04:27 PM	Tube furnace set to 0
6/28/2010	11:13:27 PM	Helium valve closed
6/28/2010	11:13:27 PM	H2 valve closed
6/28/2010	11:13:27 PM	BCl3 valve closed
6/28/2010	11:13:27 PM	PH3 valve closed
6/28/2010	11:13:27 PM	SiCl4 pre valve closed
6/28/2010	11:13:27 PM	SiCl4 post valve closed
6/28/2010	11:13:27 PM	Bubbler valve closed
6/28/2010	11:13:27 PM	Main Vac valve opened
6/28/2010	11:13:27 PM	Bypass valve opened
6/28/2010	11:13:27 PM	Helium MFC set to  0.000000
6/28/2010	11:13:27 PM	H2 MFC set to  0.000000
6/28/2010	11:13:27 PM	BCl3 MFC set to  0.000000
6/28/2010	11:13:27 PM	PHl3 MFC set to  0.000000
6/28/2010	11:13:27 PM	SiCl4 MFC set to  0.000000
6/28/2010	11:13:27 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	11:13:27 PM	Tube furnace set to 0
6/28/2010	11:13:28 PM	Run finished at 11:13 PM
6/28/2010	11:30:44 PM	Helium MFC set to  100.000000
6/28/2010	11:30:45 PM	Helium valve opened
6/28/2010	11:35:27 PM	Helium valve closed
6/28/2010	11:36:32 PM	Bypass valve closed
6/28/2010	11:36:32 PM	Main Vac valve closed
6/28/2010	11:36:47 PM	Bypass valve opened
6/28/2010	11:36:48 PM	Main Vac valve opened
6/28/2010	11:37:46 PM	Helium valve opened
6/28/2010	11:37:51 PM	Helium valve closed
6/28/2010	11:39:00 PM	Recipe started at 11:38 PM
6/28/2010	11:39:00 PM	Helium valve closed
6/28/2010	11:39:00 PM	BCl3 valve closed
6/28/2010	11:39:00 PM	PH3 valve closed
6/28/2010	11:39:00 PM	SiCl4 pre valve closed
6/28/2010	11:39:00 PM	SiCl4 post valve closed
6/28/2010	11:39:00 PM	Main Vac valve closed
6/28/2010	11:39:00 PM	Bypass valve closed
6/28/2010	11:39:00 PM	Bubbler valve closed
6/28/2010	11:39:00 PM	H2 valve opened
6/28/2010	11:39:00 PM	Helium MFC set to  0.000000
6/28/2010	11:39:00 PM	H2 MFC set to  500.000000
6/28/2010	11:39:00 PM	BCl3 MFC set to  0.000000
6/28/2010	11:39:00 PM	PHl3 MFC set to  0.000000
6/28/2010	11:39:00 PM	SiCl4 MFC set to  0.000000
6/28/2010	11:39:00 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	11:39:00 PM	Tube furnace set to 0
6/28/2010	11:40:21 PM	Helium valve closed
6/28/2010	11:40:21 PM	BCl3 valve closed
6/28/2010	11:40:21 PM	PH3 valve closed
6/28/2010	11:40:21 PM	SiCl4 pre valve closed
6/28/2010	11:40:21 PM	SiCl4 post valve closed
6/28/2010	11:40:21 PM	Main Vac valve closed
6/28/2010	11:40:21 PM	Bypass valve closed
6/28/2010	11:40:21 PM	H2 valve opened
6/28/2010	11:40:21 PM	Bubbler valve opened
6/28/2010	11:40:21 PM	Helium MFC set to  0.000000
6/28/2010	11:40:21 PM	H2 MFC set to  500.000000
6/28/2010	11:40:21 PM	BCl3 MFC set to  0.000000
6/28/2010	11:40:21 PM	PHl3 MFC set to  0.000000
6/28/2010	11:40:21 PM	SiCl4 MFC set to  0.000000
6/28/2010	11:40:21 PM	Bypass solenoid MFC set to  0.000000
6/28/2010	11:40:21 PM	Tube furnace set to 1000
